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#110 Clean Room Compatible LCA - 1

Category : Clean room technology
March23, 2012

With the domestic industrial trends shifting towards high added values and high quality over ppm order, demands for highly functional equipment cleanliness with low investments are increasing.

(1) Technology elements required for clean compatible designs

Principles of creating and maintaining clean environments are the following 3.

  1. Do not bring in contamination.
  2. Do not generate contamination.
  3. Do not allow contamination to accumulate.

The elemental technologies to form and maintain each one of the principles on LCA mechanisms would be as follows.

[Table 1] Main technological elements comprising the 3 principles of cleanliness
3 principles of cleanliness Elemental technology Explanation
[1]
Do not bring in contamination.
Filtering technology Remove contamination with filtering
Washing /
Packaging technology
Packaging to bring in after removing contamination
Atmospheric pressure control technology Macro air flow control to maintain clean environments
Air flow control technology Micro air flow control technology to maintain clean environments
Measure and evaluation technology
(common)
Contamination amount measurement technology Air pressure /
flow measurement technology
LCA design technology (common) All LCA design technologies
[2]
Do not generate contamination.
Friction /
wear reduction technology
(Lubrication technology)
Technology to reduce particles from moving slide parts
Materials technology Corrosion resistant materials, Static electricity control materials, Sealing materials, etc.
Packaging technology Packaging
Measurement evaluation technology Same as [1]
LCA design technology (common) Same as [2]
[3]
Do not allow contamination to accumulate.
Static control technology Reduction of contamination accumulation by static charges
Air flow control technology Reduction of contamination scattering by floating
Cleaning
(Cleaning technology)
Removal of accumulated contamination
Measurement evaluation technology (Common) Same as [1]
LCA design technology (common) Same as [2]

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